＜要旨＞ This review describes the presence of three layers in polymer thin films, named neighborhood of film surface, film inside, and neighborhood of film interface contacted to a substrate. The presence of the three layers was indicated through nanoimprint technology. Sequential infiltration synthesis and saturated vapor infiltration with a reactive inorganic precursor allowed organic/inorganic hybridization of polymer thin films on substrates and indicated the presence of the three layer in thermoplastic and photo-cured polymer thin films from elemental mapping of hybridized polymer thin films by scanning transmission electron microscopy and energy dispersive X ray spectroscopy. More detailed understanding of the polymer thin films affected by processes will lead to the development of reliable nanofabrication technology including nanoimprint technology.
Keywords: Polymer Thin Film / Surface / Interface / Nanoimprint / Scanning Transmission Electron Microscopy / Energy Dispersive X Ray Spectroscopy / Sequential Infiltration Synthesis / Saturated Vapor Infiltration |