| POLYMERS Vol.61 No.9 |
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COVER STORY Nanoimprint Technology Opens Versatile Possibilities of Industrial Fabrication in the Future: Original Approaches in Our Companies |
| Approximately 20 years ago, it was thought that in general there is no industrial
mass-production technology to ever make patterns smaller than 50 nm for
fabricating advanced devices. In 1995, suddenly, the preparation of such
small patterns was demonstrated made from polymer resist materials and
metals using nanoimprint lithography. Currently, frontier research on
nanostructure devices and nanofabrication technology at single digit
nanometers smaller than 10 nm are in progress. Nanoimprint lithography
is considered to be one of the most promising nanofabrication techniques
to realize nanoelectronics devices, magnetic recording patterned media,
effectively improved light emitting diodes, and so forth. In this special
issue on nanoimprint technology we introduce success stories of the field
including the circumstance, breakthrough, and original approaches relevant
to materials, processes, and devices in respective companies. （Editors : NAKAGAWA, KAIDA,
TAGAYA, and MATSUI (guest editor)） |
| Digest for English Readers | 680
|
| Hot Topics in Polymer Science in Japan | 683
|
| Commentary |
| Landscape of Nanoimprint Technology | Masanori KOMURO | 684
|
| COVER STORY: Topics and Products |
| High Etching Stability NIL Material | Satoshi SHIMATANI | 685
|
| Our Motivation, Development of UV-Curable Resins for Nanoimprint | Hiroto MIYAKE | 687
|
| Replica Polymeric Film Mold and its Large-Scale Technology | Takahide MIZAWA | 689
|
| Development of Seamless Roller Mold (SRM) for Roll-to-Roll Process | Masayuki ABE | 691
|
| NIL Mold – A Challenge Toward Sub-20 nm Patterning | Morihisa HOGA | 693
|
| Nanoimprint Toward Industrial Application | Akihiro MIYAUCHI | 695
|
| Mass Production Nano-Imprint System for High Brightness LED | Mitsunori KOKUBO | 697
|
| Challenges to be Applied for Next Generation CMOS and HDD Device Manufacturing with Jet and Flash Imprint Lithography | Hideyuki WADA | 699
|
| Application of Nanoimprint Lithography to Laser Diodes Used in Optical Fiber Network | Masaki YANAGISAWA | 701
|
| Development of Optical Devices Using Nanoimprint Technologies | Hiroshi SAKAMOTO | 703
|
| PolyMANGA | 705
|
| Front-Line Polymer Science |
| Recent Development of Demolding Technology in Nanoimprint Lithography | Masaru NAKAGAWA | 706
|
| Polymer Science and I: A Personal Account |
| Dear myself Ten Years Later | Tomonori WAKU | 710 |
| Messages: “Work and Life” |
| Japan Inter-Society Liaison Association Committee for Promoting Equal Participation of Men and Women in Science and Engineering | Kazue KURIHARA | 711
|
| MACRO Economy | 712
|
| SPSJ 60th Anniversary: Messages from Research Group | 713
|
| Messages from SPSJ | 720
|
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